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CCQ型气动超高真空插板阀是通过电磁换向阀改变气路方向，控制执行气缸驱动阀板作上下运动，达到阀门的开启或关闭。阀门用于接通或切断真空管路中的气流。适用介质为纯净空气和非腐蚀性气体。
带反馈信号装置。
■ CCQ
Pneumatic Ultra-high Vacuum Gate Valve
■ CCQ pneumatic ultra-high vacuum gate valve uses solenoid directional valve to change the direction of air passage, and controls the actuating cylinder to drive the valve disc up and down to make the valve opened or closed. It is used to put through or cut off the air passage in vacuum pipeline. Applicable medium can be pure air and noncorrosive gases.
With signal feedback device.
■ 主要技术性能
Main Technical Performance
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■ 适用范围：Applicability 105～1.3×10-7Pa
阀门漏率：Valve Leak Rate ≤1.3×10-7Pa.L/S.(DN≤200)
≤6.7×10-7Pa.L/S.(DN≥250)
适用温度：Applicable Temperature -30～+150℃
阀门开启时阀板两侧的压差：
The differential pressure between the two sides of valve disc upon valve opening: ≤2.7×103Pa.
气源压力：Annoy pressure 0.4～0.6MPa
■ 主要零件材料
Materials of Main Parts
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■ 阀体、阀板：不锈钢
密封件：氟橡胶、波纹管(轴封)、丁腈橡胶。
Body, and disc: stainless steel
Sealing element: Viton, bellows(shaft seal), NB
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